JPH0289370U - - Google Patents
Info
- Publication number
- JPH0289370U JPH0289370U JP16876888U JP16876888U JPH0289370U JP H0289370 U JPH0289370 U JP H0289370U JP 16876888 U JP16876888 U JP 16876888U JP 16876888 U JP16876888 U JP 16876888U JP H0289370 U JPH0289370 U JP H0289370U
- Authority
- JP
- Japan
- Prior art keywords
- stopper
- trajectory
- inspection position
- autohandler
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 7
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16876888U JPH0289370U (en]) | 1988-12-27 | 1988-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16876888U JPH0289370U (en]) | 1988-12-27 | 1988-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0289370U true JPH0289370U (en]) | 1990-07-16 |
Family
ID=31458237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16876888U Pending JPH0289370U (en]) | 1988-12-27 | 1988-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0289370U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09281184A (ja) * | 1996-04-17 | 1997-10-31 | Matsushita Electron Corp | 半導体装置の検査装置 |
-
1988
- 1988-12-27 JP JP16876888U patent/JPH0289370U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09281184A (ja) * | 1996-04-17 | 1997-10-31 | Matsushita Electron Corp | 半導体装置の検査装置 |
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